NEWPORT 优铂特 972B-71034 972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
Vacuum Transducer, Cold Cathode-MicroPirani, Display, 2.75 in. CF, RS232, 3 Relays
概览
The 972B-71034 DualMag Cold Cathode Vacuum Transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and features a 2.75 inch CF flange fitting. It has an RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. Three included mechanical relays can be used for process control like interlocking valves or pumps. DualMag transducers combine cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure. The MicroPirani offers 1-2 decades lower measuring range than a traditional pirani gauge, subsequently by lowering the cold cathode activation pressure gauge, reliability is improved and the service interval extended. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software. The integrated touch-screen display is user configurable; the user can change pressure units, orientation and has access to set point parameters as well as gas type. The display also indicates the status of the available set point relays. Displayed pressure reading from individual sensors or combined reading can be seen from >5 meters away on the high contrast display.
技术参数
类型
Vacuum Transducer
Sensor Type
Cold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
显示
Touch-screen
真空压力范围
1.0 x 10-8 to 760 Torr
模拟输出
0.5 VDC per Decade
通信类型
RS232/analog
精度
5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical) Combined Absolute
方向
Any
配件类型
2.75 in. CF
设定值继电器
3
继电器触点额定值
1 A @ 30VAC/DC, resistive
裸露的材料
304 and 403 stainless steel, silicon, SiO2, SiN4, gold, Viton, epoxy resin, ceramic
电源要求
9 - 30 VDC, 2 Watts
工作温度范围
0 - 40°C (32 - 104°F)
存储温度范围
85°C (185°F)
电接头
15-pin, High Density, D-sub male
CE 认证
Yes
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