NEWPORT 优铂特 390511-2-YG-T 390 Micro-Ion ATM Modular Vacuum Pressure Transducers
Vacuum Gauge, Micro-Ion ATM, Display, 2.75 in. CF, RS485, 2 Relays
概览
The 390511-2-YG-T Micro-Ion® ATM Vacuum Gauge Module features 1x10-9 Torr - Atmosphere pressure measurement, a 2.75 inch CF flange fitting, and RS485 communications. A digital display for local pressure readings is included. Two set point control relays are included to simplify process control functions. Settings are configurable through the RS-485 interface. It combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.
技术参数
类型
Vacuum Gauge Module
显示
Graphics LCD
真空压力范围
Absolute: 1.0 x 10-9 to 760 Torr
Differential: -750 to +250 Torr模拟输出
0.5-7.0 VDC (0.5 VDC per Decade Logarithmic)
Optional Differential:1-5 VDC (-750 to +250 Torr Linear)通信类型
Digital RS485
精度
Absolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading.
Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)配件类型
2.75 in. CF
设定值继电器
2
继电器触点额定值
Maximum: 1 A at 30 VDC, resistive load, Minimum: 5 mA at 5 VDC, resistive load
内部容积
10.8 cm3 (0.65 in.3)
X射线极限
<3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal
电子轰击除气
3 Watts for 1 minute/filament
灯丝
Yttria-coated Iridium
裸露的材料
304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass
电源要求
24 VDC +10% to -15%, 1 Amp, 22 Watts nominal
最大热烘温度
105°C (221°F) with electronics removed
工作温度范围
10 - 40°C (50° to 104°F), non-condensing
存储温度范围
-40 - 70°C (-40 - 158°F)
电接头
15-pin subminiature-D male
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