NEWPORT 优铂特 972B-21020 972B DualMag™ Cold Cathode - MicroPirani™ Vacuum Transducers
Vacuum Transducer, Cold Cathode-MicroPirani, NW25 ISO-KF, RS232
概览
The 972B-21020 DualMag Cold Cathode Vacuum Transducer offers a measurement range from 1x10-8 Torr to atmospheric pressure and features a size NW25 ISO-KF flange fitting. It has an RS232 digital communication interface for setup of transducer parameters and to provide real time pressure measurement. DualMag transducers combine cold cathode inverted magnetron and MicroPirani thermal conductivity MEMS sensor technologies. The MicroPirani automatically controls the cold cathode sensor to ensure optimal ignition pressure. The MicroPirani offers 1-2 decades lower measuring range than a traditional pirani gauge, subsequently by lowering the cold cathode activation pressure gauge, reliability is improved and the service interval extended. All Series 970B transducers have an analog pressure output of 0.5VDC/decade that can be interfaced to external analog equipment for pressure readout or control. Other analog outputs and curves can be selected via the digital user interface. The Series 970B have standard 15 pin HD Sub-D connector. It can also emulate analog voltage outputs from a variety of other vacuum transducers. The emulation feature can be used to upgrade and replace other vendors’ gauges in OEM applications without changing system software. The Series 970B has up to three mechanical relays which can be used for process control, examples are interlocking valves or pumps.
技术参数
类型
Vacuum Transducer
Sensor Type
Cold Cathode and MicroPirani™ (MEMS Thermal Conductivity)
显示
No
真空压力范围
1.0 x 10-8 to 760 Torr
模拟输出
0.5 VDC per Decade
通信类型
RS232/analog
精度
5 x 10-8 Torr to 10-3 ±30% of Reading, 10-3 to 100 ±5% of Reading (Typical)Combined Absolute
方向
Any
配件类型
NW25 ISO-KF
设定值继电器
0
电源要求
9 - 30 VDC, 2 Watts
最大热烘温度
85°C (185°F)
工作温度范围
0 - 40°C (32 - 104°F)
电接头
15-pin, High Density, D-sub male
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