NEWPORT 优铂特 390410-0-YG-T 390 Micro-Ion ATM Modular Vacuum Pressure Transducers

NEWPORT 优铂特 390410-0-YG-T   390 Micro-Ion ATM Modular Vacuum Pressure Transducers

Vacuum Gauge, Micro-Ion ATM, 2.75 in. CF, Analog

概览

The 390410-0-YG-T Micro-Ion® ATM Vacuum Gauge Module features 1x10-9 Torr - Atmosphere pressure measurement, a 2.75 in. (NW35-CF) ConFlat-type fitting, and analog output. It combines proven Micro-Ion® ionization vacuum gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, the 390 Micro-Ion® ATM Micro-Ion®/Conductron/Piezo Vacuum Gauge Module is capable of providing accurate absolute pressure up to Atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique vacuum sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. The small 390 Micro-Ion® ATM combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space.

技术参数

• 类型

  Vacuum Gauge Module

  
  

• 显示

  No

  
  

• 真空压力范围

  Absolute: 1.0 x 10-9 to 760 Torr
  Differential: -750 to +250 Torr

  
  

• 模拟输出

  0.5-7.0 VDC (0.5 VDC per Decade Logarithmic
  Differential:1-5 VDC (-750 to +250 Torr Linear) (optonal))

  
  

• 通信类型

  Analog

  
  

• 精度

  Absolute: 1x10-8 to 100 mTorr: ±15% of Reading, 100 mTorr to 150 Torr: ±10% of Reading, 150 to 1000 Torr: ±2.5% of Reading, 1.33 x 10-8 to 0.133 mbar: ±15% of Reading, 0.133 to 200 mbar: ±10% of Reading, 200 to 1,333 mbar: ±2.5% of Reading, 1.33 x 10-6 to 13.3 Pa: ±15% of Reading, 13.3 to 2.00 x 104 Pa: ±10% of Reading, 2.00 x 104 to 1.33 x 105 Pa: ±2.5% of Reading. Differential: ±(2.5 Torr + 2.5% of Reading), ±(3.3 mbar + 2.5% of Reading), ±(0.33 kPa + 2.5% of Reading)

  
  

• 配件类型

  2.75 in. CF

  
  

• 设定值继电器

  0

  
  

• 内部容积

  10.8 cm3 (0.65 in.3)

  
  

• X射线极限

  <3 x 10-10 Torr, <4 x 10-10 mbar, <4 x 10-8 Pascal

  
  

• 电子轰击除气

  3 Watts for 1 minute/filament

  
  

• 灯丝

  Yttria-coated Iridium

  
  

• 裸露的材料

  304 stainless steel, tantalum, tungsten, yttria-coated iridium, alumina, CuAg eutectic, Kovar, gold or nickel plated Kovar, borosilicate glass

  
  

• 电源要求

  24 VDC +10% to -15%, 1 Amp, 22 Watts nominal

  
  

• 最大热烘温度

  105°C (221°F) with electronics removed

  
  

• 工作温度范围

  10 - 40°C (50° to 104°F), non-condensing

  
  

• 存储温度范围

  -40 - 70°C (-40 - 158°F)

  
  

• 电接头

  15-pin subminiature-D male

  
  

• CE 认证

  Yes

  
  

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