NEWPORT 优铂特 GE50A013204RMV020 GE50A Viton Sealed 10-50,000 sccm Mass Flow Controllers

NEWPORT 优铂特 GE50A013204RMV020   GE50A Viton Sealed 10-50,000 sccm Mass Flow Controllers

Mass Flow Controller, 20,000 sccm, 4 VCR Male, 0-5 VDC, DB15, Viton Seal

概览

The G-Series GE50A013204RMV020 digitally-controlled mass flow controller utilizes the latest MKS control algorithms for fast and repeatable response to set point throughout the device control range. It has a Full Scale Flow Range of 20,000 sccm and a control range of 400 to 20,000 sccm, a 15-pin D-subminature connector with tied grounds, and a 0-5 VDC flow input/output signal.

技术参数

• 类型

  Mass Flow Controller

  
  

• 校准气体

  N2 (or equivalent)

  
  

• 满量程流量范围

  20000 sccm

  
  

• 最大入口压力

  150 psig

  
  

• 正常工作压差

  10 to 40 psid

  
  

• 验证压力

  1000 psig

  
  

• 爆破压力

  1500 psig

  
  

• 配件类型

  4 VCR male

  
  

• 控制范围

  400 - 20000 sccm

  
  

• 流量输入输出信号

  0 - 5 VDC

  
  

• 连接器类型

  15-pin D-sub (tied grounds)

  
  

• 典型精度

  ±1% of set point for 20 to 100% Full Scale, ±0.2% of Full Scale for 2 to 20% Full Scale

  
  

• 重复精度

  ±0.3% of Reading

  
  

• 分辨率

  0.1% of Full Scale

  
  

• 零温度系数

  Coefficient<0.05% of Full Scale/°C

  
  

• 跨度温度系数

  <0.08% of Reading/°C

  
  

• 入口压力系数

  <0.02% of Reading/psi

  
  

• 典型稳定时间

  <750 msec, typical above 5% Full Scale

  
  

• 预热时间

  30 minutes

  
  

• 工作温度范围

  10 - 50°C

  
  

• 存储湿度

  0 to 95% Relative Humidity, non-condensing

  
  

• 存储温度范围

  -20 to 80°C

  
  

• 外部泄漏完整性

  <1 x 10-09 (scc/sec He)

  
  

• 通过关闭阀门泄漏完整性

  Up to 10K valve <0.1% of FS at 40 psig to atmosphere, 20K - 50K valve <1.0% of FS at 40 psig to atmosphere

  
  

• 润湿材料

  316L S.S. VAR, 316 S.S., Elgiloy®, Nickel

  
  

• 密封材料

  Viton

  
  

• 表面光洁度

  16µ inch average Ra

  
  

• CE 认证

  Yes

  
  

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